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dc.contributor.authorKumar, Tarun
dc.date.accessioned2020-10-29T09:13:43Z
dc.date.available2013-07-03
dc.date.issued2013-05-21
dc.identifier.urihttps://erepo.uef.fi/handle/123456789/12647
dc.language.isoen
dc.publisherItä-Suomen yliopistofi
dc.publisherUniversity of Eastern Finlanden
dc.titleCharacterization of diffraction gratings using scatterometry
dc.contributor.departmentFysiikan ja matematiikan laitosfi
dc.contributor.departmentDepartment of Physics and Mathematicsen
dc.type.publicationinfo:eu-repo/semantics/masterThesis
dc.contributor.organizationLuonnontieteiden ja metsätieteiden tiedekunta, Fysiikan ja matematiikan laitosfi
dc.contributor.organizationFaculty of Science and Forestry, Department of Physics and Mathematicsen
dc.format.contentfulltext
dc.identifier.urnhttp://urn.fi/urn:nbn:fi:uef-20130725
dc.publisher.countryfi
dc.rights.accesslevelrestrictedAccess
dc.type.ontasotPro gradufi
dc.type.ontasotMaster's thesisen
uef.publication.id5252
dc.contributor.facultyLuonnontieteiden ja metsätieteiden tiedekuntafi
dc.contributor.facultyFaculty of Science and Forestryen
dc.format.displayContentJulkaisun kokotekstifi
dc.format.displayContentFulltext of publicationen
dc.subject.disciplinefysiikkafi
dc.subject.disciplinephysicsen
dc.type.coarhttp://purl.org/eprint/type/Thesis
dc.type.displayTypePro gradufi
dc.type.displayTypeMasters thesisen


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