Now showing items 1-1 of 1

    • RIE for structuring E-field processed glasses 

      Reduto, I; Raskhodchikov, D; Gangrskaia, E; Kaasik, V; Svirko, Yu; Lipovskii, A (IOP Publishing, 2018)
      We present studies of reactive ion etching of glasses modified by electric field applied to the glasses at elevated temperature. Voltage dependence of the thickness of the modified glass layers is revealed. Secondary ion ...