Browsing Luonnontieteiden, metsätieteiden ja tekniikan tiedekunta by Subject "Nanostructures"
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Traceable Mueller polarimetry and scatterometry for shape reconstruction of grating structures
(Elsevier BV, 2017)Dimensional measurements of multi-patterned transmission gratings with a mixture of long and small periods are great challenges for optical metrology today. It is a further challenge when the aspect ratio of the structures ...info:eu-repo/semantics/article