Optimization of DC magnetron sputtering process for titanium nitride

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Date
2022-06-08
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Riaz, Hasan

Masters thesis 

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Publisher
University of Eastern Finland 
Faculty of Science and Forestry, Department of Physics and Mathematics 
fotonics 
Keywords
fotoniikka   ohutkalvot   titaani   nanorakenteet   ellipsometria   atomikerroskasvatus   fotonics   thin films   titanium   nanostructures   ellipsometry   atomic layer deposition   tunnfilm   titan   nanostrukturer   ellipsometri   atomlagerdeposition   
URI
http://urn.fi/urn:nbn:fi:uef-20220667
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